JPH03157B2 - - Google Patents

Info

Publication number
JPH03157B2
JPH03157B2 JP62068113A JP6811387A JPH03157B2 JP H03157 B2 JPH03157 B2 JP H03157B2 JP 62068113 A JP62068113 A JP 62068113A JP 6811387 A JP6811387 A JP 6811387A JP H03157 B2 JPH03157 B2 JP H03157B2
Authority
JP
Japan
Prior art keywords
laser beam
workpiece
laser
translational movement
reflecting mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62068113A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63235090A (ja
Inventor
Yoshio Ootake
Michio Asai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Priority to JP62068113A priority Critical patent/JPS63235090A/ja
Publication of JPS63235090A publication Critical patent/JPS63235090A/ja
Publication of JPH03157B2 publication Critical patent/JPH03157B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Mechanical Optical Scanning Systems (AREA)
  • Laser Beam Processing (AREA)
JP62068113A 1987-03-24 1987-03-24 レ−ザ加工装置 Granted JPS63235090A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62068113A JPS63235090A (ja) 1987-03-24 1987-03-24 レ−ザ加工装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62068113A JPS63235090A (ja) 1987-03-24 1987-03-24 レ−ザ加工装置

Publications (2)

Publication Number Publication Date
JPS63235090A JPS63235090A (ja) 1988-09-30
JPH03157B2 true JPH03157B2 (en]) 1991-01-07

Family

ID=13364363

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62068113A Granted JPS63235090A (ja) 1987-03-24 1987-03-24 レ−ザ加工装置

Country Status (1)

Country Link
JP (1) JPS63235090A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4869727B2 (ja) * 2006-02-15 2012-02-08 オリンパス株式会社 測定顕微鏡装置
CN104588887A (zh) * 2014-11-19 2015-05-06 长春吉扬华欣科技有限责任公司 连杆裂解槽激光加工切割头摆动机构

Also Published As

Publication number Publication date
JPS63235090A (ja) 1988-09-30

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